Non linear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches

@article{Lazaro2007NonLA,
  title={Non linear actuation model for lateral electrostatically-actuated DC-contact RF MEMS series switches},
  author={Antonio Lazaro and David Girbau and Llu{\'i}s Pradell and Ada Nebot},
  journal={2007 Spanish Conference on Electron Devices},
  year={2007},
  pages={181-184}
}
In this work, a non linear model to predict actuation characteristics in lateral electrostatically-actuated DC-contact MEMS switches is proposed. In this case a parallel-plate approximation can not be applied. The model is based on the equilibrium equation for an elastic beam. It is demonstrated that the contribution of fringing fields is essential. The model relies on finite-difference discretization of the structures, applying boundary conditions and is solved with a Gauss-Seidel relaxation… CONTINUE READING