Noise due to Brownian motion in ultrasensitive solid-state pressure sensors

Abstract

Noise due to Brownian motion of diaphragm in ultrasensitive solid-state capacitive and piezoresistive pressure sensors operating at sub-millimeters of mercury pressures in a gaseous ambient is considered. The statistical properties and spectral characteristics of the noise are obtained as functions of the diaphragm dimensions, temperature, and applied… (More)

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