Nitrogen-Vacancy centers in diamond for current imaging at the redistributive layer level of Integrated Circuits

Abstract

We present a novel technique based on an ensemble of Nitrogen-Vacancy (NV) centers in diamond to perform Magnetic Current Imaging (MCI) on an Integrated Circuit (IC). NV centers in diamond allow measuring the three components of the magnetic field generated by a mA range current in an IC structure over a field of with sub-micron resolution. Vector… (More)
DOI: 10.1016/j.microrel.2015.06.069

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@article{Nowodzinski2015NitrogenVacancyCI, title={Nitrogen-Vacancy centers in diamond for current imaging at the redistributive layer level of Integrated Circuits}, author={Antoine Nowodzinski and Mayeul Chipaux and L. Toraille and V. Jacques and J.-F. Roch and T. Debuisschert}, journal={Microelectronics Reliability}, year={2015}, volume={55}, pages={1549-1553} }