Niobium nitride based thin films deposited by DC reactive magnetron sputtering

@inproceedings{Benkahoul2005NiobiumNB,
  title={Niobium nitride based thin films deposited by DC reactive magnetron sputtering},
  author={Moushab Benkahoul},
  year={2005}
}
Due to their high hardness, high melting point and high chemical stability, transition metal nitrides present a great interest for various applications. This work constitutes a contribution to the understanding of the properties of Nb based binary and ternary nitride materials. It deals with the study of the deposition and characterization of the niobium nitride system. Single and mixed phase thin films of niobium nitride in addition to niobium silicon nitride and niobium aluminum nitride were… CONTINUE READING

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