NiFe Plated Biaxial Magnetostatic MEMS Scanner

Abstract

A two axis microelectromechanical system (MEMS) micromirror actuator is developed for display and imaging applications. The device operates on the principle of generated magnetostatic torque by a flux generating high-frequency electro coil and a magnetic layer deposited on the movable part. The device can supply full optical scan angles of 88deg (at 100 mA… (More)

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