New tools and methodology for advanced parametric and defect structure test

Abstract

Continuing scaling trends in semiconductor technology, as well as the test requirements of new technologies being incorporated with mainstream silicon integrated circuits, has increased the complexity of parametric and defect structure testing. New testers are required which can drastically improve the throughput of parametric test, as well as efficiently… (More)
DOI: 10.1109/TEST.2010.5699201

12 Figures and Tables

Topics

  • Presentations referencing similar topics