New silicon architectures by gold-assisted chemical etching.

Abstract

Silicon nanowires (SiNWs) were produced by nanosphere lithography and metal assisted chemical etching. The combination of these methods allows the morphology and organization control of Si NWs on a large area. From the investigation of major parameters affecting the etching such as doping type, doping concentration of the substrate, we demonstrate the… (More)
DOI: 10.1021/am200948p

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