New grwoth methods of ZnO nano structures fully compatible with the bio-chemical sensor platforms

Abstract

New fabrication method of ZnO nano structures using radio-frequency sputter deposition is developed for the fabrication of bio-chemical sensing materials that are fully compatible with complementary metal-oxide-semiconductor fileld-effect-transistor (CMOS-FET) based sensor platforms. The effects of growth conditions, such as O2/Ar ratio and growth time, on… (More)

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