New Test Methodology for Static and Dynamic Shape Measurements of Microelectromechanical Systems


Characterization of surface shape and deformation is of primary importance in a number of testing and metrology applications related to the functionality, performance, and integrity of components. In this paper, a unique, compact, and versatile state-of-the-art fiber-optic-based optoelectronic holography (OEH) methodology is described. This description… (More)


11 Figures and Tables