New CMOS-Compatible Micromachined Embedded Coplanar Waveguide

Abstract

This paper proposes a new robust micromachined embedded coplanar waveguide (CPW). The central and ground plates are partially bent and overlapped within the trench, and due to tight coupling of the E -field between the overlapped plates, the micromachined embedded CPW line is capable of a wide range characteristic impedance (17.9-92.3 Ω), in a compact size… (More)

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