Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating.

@article{Kowalski2006NearnormalincidenceEE,
  title={Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating.},
  author={M. Kowalski and R. Heilmann and M. Schattenburg and Chih-Hao Chang and F. Berendse and W. Hunter},
  journal={Applied optics},
  year={2006},
  volume={45 8},
  pages={
          1676-9
        }
}
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10 degrees of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07 nm and 64.1% at 16.53 nm for the -2 and -3 orders, respectively, which are comparable to the best values… Expand
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References

SHOWING 1-10 OF 31 REFERENCES
Record high extreme-ultraviolet efficiency at near-normal incidence from a multilayer-coated polymer-overcoated blazed ion-etched holographic grating.
TLDR
To the best of the knowledge these are the highest values obtained yet at EUV wavelengths from a holographic ion-etched blazed grating. Expand
High-efficiency multilayer-coated polymer-overcoated blazed ion-etched holographic gratings for high-resolution EUV astronomical spectroscopy
We have measured the topography and near-normal incidence EUV efficiency of five flat multilayer-coated polymer-overcoated blazed ion-etched holographic test gratings. Blaze angles were in the rangeExpand
Efficiency of a multilayer-coated, ion-etched laminar holographic grating in the 14.5 16.0-nm wavelength region.
TLDR
These are believed to be the highest efficiencies obtained to date from a multilayer-coated laminar grating at near-normal incidence in the EUV (lambda<30.0nm) . Expand
Efficiency and long-term stability of a multilayer-coated, ion-etched blazed holographic grating in the 125-133-Å wavelength region.
TLDR
Oxidation and contamination of the multilayer with carbon appear to be the causes of these losses of the ion-etched blazed holographic grating. Expand
Grazing-incidence efficiencies in the 28-42-A wavelength region of replicas of the Skylab 3600-line/mm concave grating with multilayer and gold coatings.
TLDR
It is demonstrated that a multilayer coating can be used to enhance the efficiency, in a selected wavelength range and in the on-blaze order, of a grating operating at a small grazing angle. Expand
Polarization and efficiency of a concave multilayer grating in the 135-250-Å region and in normal-incidence and SeyaNamioka mounts.
TLDR
In a Seya-Namioka spectrometer mount at an angle of incidence of 30°-40°, the grating is a nearly perfect polarizing optical element in the wavelength bands between 125 and 300 Å, which are covered by the multilayer coating. Expand
On-blaze operation of a Mo/Si multilayer-coated, concave diffraction grating in the 136-142-A wavelength region and near normal incidence.
TLDR
The efficiency and resolving power of a concave, 2400-groove/mm, blazed diffraction grating that had a Mo/Si multilayer coating had a peak reflectance of 55% at 140-A near normal incidence and was a factor of 150 greater than the efficiency of a sister replica Au-coated grating in the same wavelength region. Expand
Measurements of the normal-incidence X-ray reflectance of a molybdenum-silicon multilayer deposited on a 2000 l/mm grating
Normal-incidence grating optics coated with appropriate multilayers show great promise as a means of achieving high spectral resolution at x-ray wavelengths. Multilayer-coated mirrors have been madeExpand
Thin Films And Gratings: Theories Used To Optimize The High Reflectivity Of Mirrors And Gratings For X-Ray Optics
Near normal incidence is necessary to design low aberrations X-Ray systems. High reflectivity may be obtained with suitable multilayers deposited on gratings. Classical thin film theories previouslyExpand
Multilayer-coated laminar grating with 16% normal-incidence efficiency in the 150-A wavelength region.
TLDR
A laminar grating with a Mo/Si multilayer coating with inferred groove efficiencies of 34% and 32% in the +1 and -1 orders, respectively is characterized by using synchrotron radiation and atomic force microscopy. Expand
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