Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating.

  title={Near-normal-incidence extreme-ultraviolet efficiency of a flat crystalline anisotropically etched blazed grating.},
  author={M. Kowalski and R. Heilmann and M. Schattenburg and Chih-Hao Chang and F. Berendse and W. Hunter},
  journal={Applied optics},
  volume={45 8},
We have measured the extreme-ultraviolet (EUV) efficiency at an angle of incidence of 10 degrees of a flat crystalline anisotropically etched blazed grating. The measured efficiencies are high for uncoated gratings and agree well with a calculated model derived from a reasonable estimate of the groove profile. The highest groove efficiencies derived from the measurements are 48.8% at 19.07 nm and 64.1% at 16.53 nm for the -2 and -3 orders, respectively, which are comparable to the best values… Expand
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