Near-infrared thermography using a charge-coupled device camera: application to microsystems.

  title={Near-infrared thermography using a charge-coupled device camera: application to microsystems.},
  author={Damien Teyssieux and Laurent Thiery and Bernard Cretin},
  journal={The Review of scientific instruments},
  volume={78 3},
Using near-infrared thermography microscopy and a low-cost charge-coupled device (CCD) camera, we have designed a system which is able to deliver quantitative submicronic thermal images. Using a theoretical model based on Planck's law and CCD sensor properties allowed us to determine a minimal theoretical detection temperature and an optimal temperature sensitivity of our system. In order to validate this method, we show a good relationship between a theoretical study and a thermal measurement… CONTINUE READING
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