Native oxide consumption during the atomic layer deposition of TiO 2 fi lms on GaAs ( 100 ) surfaces

@inproceedings{Gougousi2010NativeOC,
  title={Native oxide consumption during the atomic layer deposition of TiO 2 fi lms on GaAs ( 100 ) surfaces},
  author={Theodosia Gougousi and John W. Lacis},
  year={2010}
}