Nanostructure of Fluorocarbon Films Deposited on Polystyrene from Hyperthermal C 3 F 5 + Ions

Abstract

F. Ahu Akin,†,‡ Inkook Jang,§ Mark L. Schlossman,*,†,| Susan B. Sinnott,§ Gerry Zajac,⊥ Erick R. Fuoco,† Muthu B. J. Wijesundara,†,O Ming Li,|,# Aleksey Tikhonov,|,∇ Sai Venkatesh Pingali,| Amanda T. Wroble,† and Luke Hanley*,† Departments of Chemistry and Physics, UniVersity of Illinois at Chicago, Chicago, Illinois 60607-7061, Department Materials Science… (More)

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