Nanospring pressure sensors grown by glancing angle deposition.

  title={Nanospring pressure sensors grown by glancing angle deposition.},
  author={S. V. Kesapragada and Patricia. Victor and Omkaram Nalamasu and Daniel Gall},
  journal={Nano letters},
  volume={6 4},
Arrays of Cr zigzag nanosprings and slanted nanorods, 15-55 nm and 40-80-nm-wide, respectively, were grown on SiO2/Si substrates by glancing angle deposition. The arrays exhibit a reversible change in resistivity upon loading and unloading, by 50% for nanosprings and 5% for nanorods, indicating their potential as pressure sensors. The resistivity drop is due to a compression of nanosprings (by a measured 19% for an applied external force of 10(-10) N per spring), which causes them to physically… CONTINUE READING

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The inset is a blow - up of the resistance values at 0 . 56 MPa

Paritosh, D. Srolovitz
J . J . Appl . Phys . • 2002

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