Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte

  title={Nanoscale Solid State Batteries Enabled by Thermal Atomic Layer Deposition of a Lithium Polyphosphazene Solid State Electrolyte},
  author={Alexander Pearse and Thomas E. Schmitt and Elliot J. Fuller and Farid El-Gabaly and Chuan-Fu Lin and Konstantinos Gerasopoulos and Alexander C. Kozen and A. Alec Talin and Gary W. Rubloff and Keith E. Gregorcyzck},
  journal={Chemistry of Materials},
Several active areas of research in novel energy storage technologies, including three-dimensional solid state batteries and passivation coatings for reactive battery electrode components, require conformal solid state electrolytes. We describe an atypical atomic layer deposition (ALD) process for a member of the lithium phosphorus oxynitride (LiPON) family, which is employed as a thin film lithium-conducting solid electrolyte. The reaction between lithium tert-butoxide (LiOtBu) and diethyl… 

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