Nanoscale Probing of Thermal, Stress, and Optical Fields under Near-Field Laser Heating

Abstract

Micro/nanoparticle induced near-field laser ultra-focusing and heating has been widely used in laser-assisted nanopatterning and nanolithography to pattern nanoscale features on a large-area substrate. Knowledge of the temperature and stress in the nanoscale near-field heating region is critical for process control and optimization. At present, probing of… (More)
DOI: 10.1371/journal.pone.0058030

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