Nanoparticle SnO2 Gas Sensor with Circuit and Micro Heater on Chip Fabricated Using CMOS-MEMS Technique

Abstract

The fabrication of a carbon monoxide (CO) micro gas sensor integrated with an inverting amplifier circuit and a micro heater on chip using the commercial 0.35mum complementary metal oxide semiconductor (CMOS) process and a post-process have been implemented. The gas sensor is composed of a polysilicon resistor and a CO gas sensing film. Tin dioxide prepared… (More)

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