Nanomoulding with amorphous metals

@article{Kumar2009NanomouldingWA,
  title={Nanomoulding with amorphous metals},
  author={G. Kumar and Hong X. Tang and J. Schroers},
  journal={Nature},
  year={2009},
  volume={457},
  pages={868-872}
}
Nanoimprinting promises low-cost fabrication of micro- and nano-devices by embossing features from a hard mould onto thermoplastic materials, typically polymers with low glass transition temperature. The success and proliferation of such methods critically rely on the manufacturing of robust and durable master moulds. Silicon-based moulds are brittle and have limited longevity. Metal moulds are stronger than semiconductors, but patterning of metals on the nanometre scale is limited by their… Expand
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