Nanometrology Room Design : The Performance and Characterization of the Kevin G . Hall High-Accuracy Laboratory

@inproceedings{Weaver2013NanometrologyRD,
  title={Nanometrology Room Design : The Performance and Characterization of the Kevin G . Hall High-Accuracy Laboratory},
  author={John R. Weaver},
  year={2013}
}
New buildings focused on the practice of nanotechnology reflect a pressing need to develop advanced techniques to enable reliable work at the nanoscale. Often when planning a nanotechnology building, a decision must be made to include high-accuracy nanometrology rooms. The purpose of these rooms is to provide high-quality space that can be utilized on a daily basis to facilitate experiments requiring nanoscale precision, to develop new instrumentation, and to develop new techniques capable of… CONTINUE READING

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