Nanolithography and manipulation of graphene using an atomic force microscope

@inproceedings{Giesbers2018NanolithographyAM,
  title={Nanolithography and manipulation of graphene using an atomic force microscope},
  author={A. J. M. Giesbers and Uli Zeitler and Soeren Neubeck and Frank Freitag and Konstantin S. Novoselov and J. C. Maan},
  year={2018}
}
We use an atomic force microscope (AFM) to manipulate graphene films on a nanoscopic length scale. By means of local anodic oxidation with an AFM we are able to structure isolating trenches into single-layer and few-layer graphene flakes, opening the possibility of tabletop graphene based device fabrication. Trench sizes of less than 30 nm in width are attainable with this technique. Besides oxidation we also show the influence of mechanical peeling and scratching with an AFM of few layer… CONTINUE READING
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