Nanoindentation of Au and Pt / Cu thin films at elevated temperatures

@inproceedings{Volinskya2004NanoindentationOA,
  title={Nanoindentation of Au and Pt / Cu thin films at elevated temperatures},
  author={Alex A. Volinskya and N. Moody and William W. Gerberich},
  year={2004}
}
This paper describes the nanoindentation technique for measuring sputter-deposited Au and Cu thin films’ mechanical properties at elevated temperatures up to 130 °C. A thin, 5-nm Pt layer was deposited onto the Cu film to prevent its oxidation during testing. Nanoindentation was then used to measure elastic modulus and hardness as a function of temperature. These tests showed that elastic modulus and hardness decreased as the test temperature increased from 20 to 130 °C. Cu films exhibited… CONTINUE READING
Highly Cited
This paper has 17 citations. REVIEW CITATIONS

Citations

Publications citing this paper.
Showing 1-10 of 13 extracted citations

References

Publications referenced by this paper.
Showing 1-10 of 40 references

High-temperature nanoindentation testing of fused silica and other materials

  • B. D. Beake, J. F. Smith
  • Philos. Mag. A 82, 2179
  • 2003

McLellan : High - temperature elastic constants of gold singlecrystals

  • B. R.
  • Acta Metall . Mater .
  • 2003

Nanoindentation methods in interfacial fracture testing, Chapter 13 in Comprehensive Structural Integrity, edited by I

  • A. A. Volinsky, D. F. Bahr, M. D. Kriese, N. R. Moody, W. W. Gerberich
  • Milne, R.O. Ritchie, and B. Karihaloo, in Volume…
  • 2003

Exploring the hightemperature AFM and its use for studies of polymers

  • D. Ivanov, R. Daniels, S. Magonov
  • Digital Instruments Application Notes,
  • 2001

Gerberich : Interfacial toughness measurements for thin films on substrates

  • N. R. Moody, W. W.
  • Acta Mater .
  • 2001

Gerberich : Substrate effects on indentation plastic zone development in thin soft films

  • A. A. Volinsky, N. R. Moody, W. W.
  • J . Mater . Res .
  • 2001

Gerberich: Adhesion quantification of post-CMP copper to amorphous SiN passivation by nanoindentation, in Fundamentals of Nanoindentation and Nanotribiology II, edited

  • A. A. Volinsky, J. Vella, +4 authors W.W
  • Moody (Mater. Res. Soc. Symp. Proc. 649,
  • 2001

Similar Papers

Loading similar papers…