Nanoimprint Lithography

@inproceedings{Thallner2018NanoimprintL,
  title={Nanoimprint Lithography},
  author={EVGroup E. Thallner},
  year={2018}
}
  • EVGroup E. Thallner
Imprinting technology is an ancient technique for the reproduction of writings on appropriate supports. Since 1990 ́s, one of the imprinting techniques, i.e., injection moulding has been used for compact disk (CD) production. More recently, the semiconductor industry is interested in imprint related techniques because of the mass production requirement of future microelectronic circuits with a possible critical dimension down to a few nanometers. At this deep nanometer scale, traditional… CONTINUE READING

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