Nanogap capacitors : Sensitivity to sample permittivity changes

  title={Nanogap capacitors : Sensitivity to sample permittivity changes},
  author={Cristian Ionescu-Zanetti and J. Tanner Nevill and Dino Di Carlo and Ki‐Hun Jeong and Luke P. Lee},
  journal={Journal of Applied Physics},
In this article, detailed models for a number of nanogap capacitor geometries are presented, and their agreement with impedance spectroscopy data is evaluated. The detection limit is investigated using a technique for the modification of inter-electrode permittivity. Precise changes in permittivity of the sample region are introduced by timed etching of the capacitor spacer and measured in order to determine the system’s sensitivity to changes in sample permittivity. We have focused on a… 

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