Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding.

@article{Jang2017NanofluidicCF,
  title={Nanofluidic chip for liquid TEM cell fabricated by parylene and silicon nitride direct bonding.},
  author={Heejun Jang and Il-Suk Kang and Jihye Kim and Jonghyun Kim and Yun Jeong Cha and Dong Ki Yoon and Wonhee Lee},
  journal={Nanotechnology},
  year={2017},
  volume={28 37},
  pages={
          375301
        }
}
Despite the importance of nanofluidic transmission electron microscope (TEM) chips, a simple fabrication method has yet to be developed due to the difficulty of wafer bonding techniques using a nanoscale thick bonding layer. We present a simple and robust wafer scale bonding technique using parylene as a bonding layer. A nanoscale thick parylene layer was… CONTINUE READING