Nanofabricated tips for device-based scanning tunneling microscopy.

  title={Nanofabricated tips for device-based scanning tunneling microscopy.},
  author={Maarten Leeuwenhoek and Richard A. Norte and Koen M Bastiaans and Doohee Cho and Irene Battisti and Ya. M. Blanter and Simon Gr{\"o}blacher and Milan P. Allan},
  volume={30 33},
We report on the fabrication and performance of a new kind of tip for scanning tunneling microscopy. By fully incorporating a metallic tip on a silicon chip using modern micromachining and nanofabrication techniques, we realize so-called smart tips and show the possibility of device-based STM tips. Contrary to conventional etched metal wire tips, these can be integrated into lithographically defined electrical circuits. We describe a new fabrication method to create a defined apex on a silicon… 
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