Nanofabricated solid immersion lenses registered to single emitters in diamond

@article{Marseglia2011NanofabricatedSI,
  title={Nanofabricated solid immersion lenses registered to single emitters in diamond},
  author={L. Marseglia and J. Hadden and A. C. Stanley-Clarke and J. Harrison and B. Patton and Y. Ho and B. Naydenov and F. Jelezko and J. Meijer and P. Dolan and J. M. Smith and J. Rarity and J. O'Brien},
  journal={Applied Physics Letters},
  year={2011},
  volume={98},
  pages={133107}
}
We describe a technique for fabricating micro- and nanostructures incorporating fluorescent defects in diamond with a positional accuracy better than hundreds of nanometers. Using confocal fluorescence microscopy and focused ion beam etching, we initially locate a suitable defect with respect to registration marks on the diamond surface then etch a structure using these coordinates. We demonstrate the technique by etching an 8 μm diameter hemisphere positioned with single negatively charged… Expand

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