Nanoelectromechanical systems.

@article{Craighead2000NanoelectromechanicalS,
  title={Nanoelectromechanical systems.},
  author={H G Craighead},
  journal={Science},
  year={2000},
  volume={290 5496},
  pages={1532-6}
}
Nanoelectromechanical systems are evolving, with new scientific studies and technical applications emerging. Mechanical devices are shrinking in thickness and width to reduce mass, increase resonant frequency, and lower the force constants of these systems. Advances in the field include improvements in fabrication processes and new methods for actuating and detecting motion at the nanoscale. Lithographic approaches are capable of creating freestanding objects in silicon and other materials… CONTINUE READING
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