Nanocrystalline diamond matrix deposited on copper substrate by radical species restricted diffusion.

Abstract

Nanocrystalline diamond matrix (or patterned nanocrystalline diamond) have been grown by hot filament chemical vapor deposition (HFCVD) on copper substrates, which were masked by a copper template filled with through-holes. The influence of the mixing ratio for CH4/H2 source gases, total gas pressure and the aspect ratio (the ratio of hole depth to its… (More)

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Cite this paper

@article{Yu2013NanocrystallineDM, title={Nanocrystalline diamond matrix deposited on copper substrate by radical species restricted diffusion.}, author={Zhiming Yu and Xuezhang Liu and Qiuping Wei and Taiming Yang and Mengkun Tian and Hao Zhai}, journal={Journal of nanoscience and nanotechnology}, year={2013}, volume={13 10}, pages={6910-6} }