Nanocrystalline Si pathway induced unipolar resistive switching behavior from annealed Si-rich SiNx/SiNy multilayers

@inproceedings{Jiang2014NanocrystallineSP,
  title={Nanocrystalline Si pathway induced unipolar resistive switching behavior from annealed Si-rich SiNx/SiNy multilayers},
  author={Xiaofan Jiang and Zhongyuan Ma and Huafeng Yang and Jie Yu and Weiqi Wang and Wenjun Zhang and Wei Li and Jun Xu and Ling Xu and Kunji Chen and Xinfan Huang and Duan Feng},
  year={2014}
}
Adding a resistive switching functionality to a silicon microelectronic chip is a new challenge in materials research. Here, we demonstrate that unipolar and electrode-independent resistive switching effects can be realized in the annealed Si-rich SiNx/SiNy multilayers with high on/off ratio of 109. High resolution transmission electron microscopy reveals that for the high resistance state broken pathways composed of discrete nanocrystalline silicon (nc-Si) exist in the Si nitride multilayers… CONTINUE READING

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