Nano-switch for study of gold contact behavior

@article{Fruehling2009NanoswitchFS,
  title={Nano-switch for study of gold contact behavior},
  author={Adam Fruehling and Shijun Xiao and Minghao Qi and K. Roy and Dimitrios Peroulis},
  journal={2009 IEEE Sensors},
  year={2009},
  pages={248-251}
}
In this paper we present the fabrication and characterization of a new NEMS DC switch as a vehicle to characterize Au-to-Au contacts at nano-scale. The switch consists of a 1050-nm long, 200-nm wide and 50-nm thick cantilever gold beam. The measured on-state resistance values range from 83 Ω to 640 Ω and the actuation voltages from 4 V to 22 V. All measurements are conducted at a current of 1 µA and the obtained values are in good qualitative agreement with traditional elastic-plastic contact… CONTINUE READING

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