Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly

@inproceedings{Warisawa2011NanoPO,
  title={Nano Patterning on Surfaces of 3-D Micro Structures by Means of Block Copolymer Self Assembly},
  author={Shin'ichi Warisawa and Hiroyuki Mino and Reo Kometani and Sunao Ishihara},
  year={2011}
}
In this paper, we present the possibility of nano-scale patterning on surfaces of 3-D micro structures by means of block copolymer self assembly. We succeeded in forming vertical cylinders on the surfaces of the 3-D micro structures using dip-coat process with Au deposition instead of random copolymers. The material of 3-D structures fabricated by FIB-CVD was diamond-like carbon (DLC) due to selecting phenanthrene as a gas source. Since the surface energy of DLC is low, instead of PS-r-PMMA… CONTINUE READING