NN-Based Key-Variable Selection Method for Enhancing Virtual Metrology Accuracy

@inproceedings{Lin2009NNBasedKS,
  title={NN-Based Key-Variable Selection Method for Enhancing Virtual Metrology Accuracy},
  author={Tung Ho Lin and Fan-Tien Cheng and Wei Ming Wu and Chi An Kao and Aeo Juo Ye and Fu Chien Chang},
  year={2009}
}
  • Tung Ho Lin, Fan-Tien Cheng, +3 authors Fu Chien Chang
  • Published 2009
  • Engineering
  • This paper proposes an advanced key-variable selection method, the neural-network-based stepwise selection (NN-based SS) method, which can enhance the conjecture accuracy of the NN-based virtual metrology (VM) algorithms. Multi-regression-based (MR-based) SS method is widely applied in dealing with key-variable selection problems despite the fact that it may not guarantee finding the best model based on its selected variables. However, the variables selected by MR-based SS may be adopted as the… CONTINUE READING

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