NC-controlled production of smooth 3D surfaces in brittle materials with 193-nm excimer laser

@inproceedings{Tnshoff1998NCcontrolledPO,
  title={NC-controlled production of smooth 3D surfaces in brittle materials with 193-nm excimer laser},
  author={Hans Kurt T{\"o}nshoff and Christoph Graumann and Hanno Hesener and Marcus Rinke},
  booktitle={Photonics West - Micro and Nano Fabricated Electromechanical and Optical Components},
  year={1998}
}
Micromachining performed by Excimer Lasers in conjunction with NC-controlled machines offer flexible production possibilities for 3-D-surfaces. Due to the limitations of conventional micromachining technology for brittle transparent materials in the micro range, a new laser machining beam guiding and data handling system was designed and built. The data handling starts with the mathematical description of the surface shape to be machined. The contour can be derived from a mathematical function… CONTINUE READING

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