Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation

  title={Multimodal Electrothermal Silicon Microgrippers for Nanotube Manipulation},
  author={K. N. Andersen and D. H. Petersen and Kenneth Carlson and Kristian Molhave and Ozlem Sardan and Andy Horsewell and Volkmar Eichhorn and Sergej Fatikow and Peter Boggild},
  journal={IEEE Transactions on Nanotechnology},
Microgrippers that are able to manipulate nanoobjects reproducibly are key components in 3-D nanomanipulation systems. We present here a monolithic electrothermal microgripper prepared by silicon microfabrication, and demonstrate pick-and-place of an as-grown carbon nanotube from a 2-D array onto a transmission electron microscopy grid, as a first step toward a reliable and precise pick-and-place process for carbon nanotubes. 
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