Multiline short-pulse solid-state seeded carbon dioxide laser for extreme ultraviolet employing multipass radio frequency excited slab amplifier.

Abstract

In this Letter we describe in more detail a solid-state seeded, nanosecond pulse, multiline CO(2) oscillator designed and built for the extreme ultraviolet (EUV) laser-produced-plasma (LPP) source. Our oscillator featured quantum cascade laser seeders, a diffraction-type seed beam combiner, and a radio-frequency-discharge-excited, diffusion-cooled, slab… (More)
DOI: 10.1364/OL.38.000881

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