Multilevel Suspended Thin-Film Inductors on Silicon Wafers

  title={Multilevel Suspended Thin-Film Inductors on Silicon Wafers},
  author={Chih-Ming Tai and C. Y. Liao},
  journal={IEEE Transactions on Electron Devices},
Single-level and double-level (DL) suspended inductors on low-resistivity silicon wafers were successfully fabricated and characterized in the multigigahertz frequency range. Three-dimensional suspended inductor structures were realized by a sacrificial molding and electroplating technique. The multilevel suspended inductor structure can reduce the capacitive coupling with the silicon substrate effectively and achieve a large inductance-to-area ratio. It is found that the DL suspended inductor… CONTINUE READING


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