Multilayer porous structures on GaN for the fabrication of Bragg reflectors

@inproceedings{Braniste2017MultilayerPS,
  title={Multilayer porous structures on GaN for the fabrication of Bragg reflectors},
  author={Tudor Braniste and Eduard Monaico and Denzal Martin and Jean-François Carlin and Valentin Popa and Veaceslav Ursaki and Nicolas Grandjean and I. M. Tiginyanu},
  booktitle={Microtechnologies},
  year={2017}
}
We report on the development of electrochemical etching technology for the production of multilayer porous structures |(MPS) allowing one to fabricate Bragg reflectors on the basis of GaN bulk substrates grown by Hydride Vapor Phase Epitaxy |(HVPE). The formation of MPS during anodization is caused by the spatial modulation of the electrical conductivity throughout the surface and the volume of the HVPE-grown GaN substrate, which occurs according to a previously proposed model involving… CONTINUE READING

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