Multi tips atomic force microscopy for dynamic nanomovement detection

Abstract

In this paper, we nano-engineered commercial atomic force microscope (AFM) probes with multi nano tip structures for high speed/resolution dynamic nanodetection. The tip radius could be shrunk down to 2.5 nm, and the time resolution could be approaching 10 ms for measuring particle movement. The multi tip AFM can be applicable for detecting the dynamic… (More)

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Cite this paper

@article{Chiou2015MultiTA, title={Multi tips atomic force microscopy for dynamic nanomovement detection}, author={Yon-tien Chiou and Jui Ming Chang and Y. C. Chen and F. G. Tseng and Shunfeng Yang}, journal={2015 Transducers - 2015 18th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS)}, year={2015}, pages={1413-1416} }