Morphological stability of multilayer film surface during diffusion processes

Abstract

It is well known that multilayer thin film structures are inherently stressed owing to lattice mismatch between different layers. Similar to other stressed solids, such materials can self-organize a surface shape with mass redistribution to minimize a total energy. However, the morphological stability are very important in fabrication of defect-free… (More)

2 Figures and Tables

Topics

  • Presentations referencing similar topics