Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS

Abstract

An electroplating spring-bridge micro-tensile specimen is fabricated to carry out a series of monotonic tensile testing on it. Freestanding thin films were loaded by performing monotonic loading/unloading and tensiontension fatigue experiments. Loading was applied using a piezoelectric actuator with 0.1 μm resolution connected through pin hole into the test chip specimen. Loads were measured by connected a capacitor load cell with a resolution of less than 0.1 mN. We found the modulus of gold, copper and tantalum nitride thin films with thickness of 200~800nm at ambient temperature. Displacement controlled tension-tension fatigue experiments have also been performed and a trend of decreasing cycles to failure with increasing displacement amplitude and increasing mean displacement has been noted.

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Cite this paper

@article{Lin2007MonotonicAF, title={Monotonic and fatigue testing of spring-bridged freestanding microbeams application for MEMS}, author={Ming-Tzer Lin and K.-S. Shiu and Chi-Jia Tong}, journal={CoRR}, year={2007}, volume={abs/0802.3083} }