• Materials Science
  • Published 1988

Monomolecular stages of pyrolysis of the SiHâ + NâO mixture during deposition of silicon dioxide layers

@inproceedings{Sukhov1988MonomolecularSO,
  title={Monomolecular stages of pyrolysis of the SiH{\^a} + N{\^a}O mixture during deposition of silicon dioxide layers},
  author={M. S. Sukhov and S. M. Kokorin},
  year={1988}
}