Monomolecular stages of pyrolysis of the SiHâ + NâO mixture during deposition of silicon dioxide layers
@inproceedings{Sukhov1988MonomolecularSO, title={Monomolecular stages of pyrolysis of the SiH{\^a} + N{\^a}O mixture during deposition of silicon dioxide layers}, author={M. S. Sukhov and S. M. Kokorin}, year={1988} }