Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

@article{Beyeler2007MonolithicallyFM,
  title={Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field},
  author={Felix Beyeler and Adrian Neild and S. Oberti and D. J. Bell and Yu Sun and J. Dual and B. J. Nelson},
  journal={Journal of Microelectromechanical Systems},
  year={2007},
  volume={16},
  pages={7-15}
}
  • Felix Beyeler, Adrian Neild, +4 authors B.J. Nelson
  • Published 2007
  • Materials Science
  • Journal of Microelectromechanical Systems
  • This paper reports an electrostatic microelectromechanical systems (MEMS) gripper with an integrated capacitive force sensor. The sensitivity is more than three orders of magnitude higher than other monolithically fabricated MEMS grippers with force feedback. This force sensing resolution provides feedback in the range of the forces that dominate the micromanipulation process. A MEMS ultrasonic device is described for aligning microobjects suspended in water using ultrasonic fields. The… CONTINUE READING

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