Monolithically Fabricated Microgripper With Integrated Force Sensor for Manipulating Microobjects and Biological Cells Aligned in an Ultrasonic Field

Abstract

This paper reports an electrostatic microelectromechanical systems (MEMS) gripper with an integrated capacitive force sensor. The sensitivity is more than three orders of magnitude higher than other monolithically fabricated MEMS grippers with force feedback. This force sensing resolution provides feedback in the range of the forces that dominate the… (More)

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