Monolithic microfabricated valves and pumps by multilayer soft lithography.

  title={Monolithic microfabricated valves and pumps by multilayer soft lithography.},
  author={Marc Alexander Unger and Hou-pu Chou and Todd Thorsen and Axel Scherer and Stephen R. Quake},
  volume={288 5463},
Soft lithography is an alternative to silicon-based micromachining that uses replica molding of nontraditional elastomeric materials to fabricate stamps and microfluidic channels. We describe here an extension to the soft lithography paradigm, multilayer soft lithography, with which devices consisting of multiple layers may be fabricated from soft materials. We used this technique to build active microfluidic systems containing on-off valves, switching valves, and pumps entirely out of… 
Multilayer soft lithography of perfluoropolyether based elastomer for microfluidic device fabrication.
The successful fabrication of microfluidic devices from a novel perfluoropolyether based polymer utilizing the Multilayer Soft Lithography™ (MSL) technique with simple, straightforward processing is reported.
Pneumatic microvalves fabricated by multi-material 3D printing
  • Xue Jiang, P. Lillehoj
  • Engineering, Materials Science
    2017 IEEE 12th International Conference on Nano/Micro Engineered and Molecular Systems (NEMS)
  • 2017
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