Monolithic magnetic circuit for MEMS magnetic device


This paper proposes monolithic magnetic circuits for a micro-electro-mechanical system (MEMS) magnetic device. The problem with existing miniature magnetic devices is the fabrication of the miniature magnetic circuit, such as a winding wire. The proposed magnetic circuit has a miniature three-dimensional coil structure and a magnetic core within the… (More)
DOI: 10.1109/IECON.2016.7794105


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