Monolithic integration of a nanomechanical resonator to an optical microdisk cavity.


We report a Silicon nano-opto-mechanical device in which a nanomechanical doubly-clamped beam resonator is integrated to an optical microdisk cavity. Small flexural oscillations of the beam cause intensity modulations in the circulating optical field in the nearby microdisk cavity. By monitoring the corresponding fluctuations in the cavity transmission via… (More)
DOI: 10.1364/OE.20.004272