Monolithic high-Q overhang inductors fabricated on silicon and glass substrates

  title={Monolithic high-Q overhang inductors fabricated on silicon and glass substrates},
  author={Jun-Bo Yoon and Chui-Hi Han and Euisik Yoon and Choong-Ki Kim},
  journal={International Electron Devices Meeting 1999. Technical Digest (Cat. No.99CH36318)},
We have investigated the RF performance of the micromachined integrated spiral inductors overhanging several tens of microns from the substrate, having at least 10 /spl mu/m in copper thickness. From the experiments, it can be speculated that once the inductor is overhung by at least 30 /spl mu/m, the substrate coupling can be eliminated almost completely, even in the standard silicon substrate, as long as there is no additional support. The inductor overhanging 30 /spl mu/m from the standard… CONTINUE READING
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