Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers

@article{Brab1993MonolithicSI,
  title={Monolithic System Integration of Optical Devices, Photodetectors and Analog Transimpedance CMOS Amplifiers},
  author={E. Brab and Ulrich Hilleringmann and Klaus Schumacher},
  journal={ESSCIRC '93: Nineteenth European Solid-State Circuits Conference},
  year={1993},
  volume={1},
  pages={242-245}
}
The monolithic system integration of optical components, photodetectors and analog transimpedance CMOS amplifiers is shown. On the basis of a submicron CMOS process an advanced SWAMI LOCOS technique is applied. Different optical devices like waveguides, beam splitters, interferometers and mirrors have been integrated. The optical system consists of a SiON layer deposited on 2¿m field oxide. The waveguides are made of structured SiO2 layers on top of the SiON layer. Leaky wave or butt coupled… CONTINUE READING