Monolithic Integration of CMOS VLSI and Carbon Nanotubes for Hybrid Nanotechnology Applications

@article{Akinwande2008MonolithicIO,
  title={Monolithic Integration of CMOS VLSI and Carbon Nanotubes for Hybrid Nanotechnology Applications},
  author={Deji Akinwande and Shinichi Yasuda and B C Paul and Shinobu Fujita and G F Close and H.-S. Philip Wong},
  journal={IEEE Transactions on Nanotechnology},
  year={2008},
  volume={7},
  pages={636-639}
}
We integrate carbon nanotube (CNT) fabrication with standard commercial CMOS very large scale integration on a single substrate suitable for emerging hybrid nanotechnology applications. This cointegration combines the inherent advantages of CMOS and CNTs. These emerging applications include CNT optical, biological, chemical, and gas sensors that require complex CMOS electronics for sensor control, calibration, and signal processing. We demonstrate the successful cointegration on a single chip… CONTINUE READING
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