Monolithic CMUT-on-CMOS integration for intravascular ultrasound applications


One of the most important promises of capacitive micromachined ultrasonic transducer (CMUT) technology is integration with electronics. This approach is required to minimize the parasitic capacitances in the receive mode, especially in catheter-based volumetric imaging arrays, for which the elements must be small. Furthermore, optimization of the available… (More)
DOI: 10.1109/TUFFC.2011.2128


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